Cobalt Tantalum Zirconium (CoTaZr) target is used in semiconductor, integrated circuits and
micro inductor.
Symbol : CoTaZr
Composition : Co4.5Ta4Zr
Other compositions available
Purity : 3N5+
Form : Planar
Color / Appearance : Silver white
Typical Density : 8.68g/cm³
Typical Dimension : Square: 600mm130mm12mm
Round: Φ440mm
Other dimensions available